An Analysis of Physico-Chemical Process of Reactive Ion Etching (RIE) to Adapt for Three Dimensional Micro-Machining

Author:

Furukawa Yuji,Kakuta Akira

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference10 articles.

1. Construction of an integrated manufacturing system for 3D microstructure;Hatamura;Annals of the CIRP,1997

2. Long-Sheng F., Yu-Chong T., Muller R.S., 1988, IC-processed electrostatic micro-motor, IEEE International Electronic Devices Meeting, 666–669

3. A combined electrical machining process for micronozzle fabrication;Masuzawa;Annals of the CIRP,1994

4. Reactive ion beam etching with CF4;Mayer;J. Electrochem. Soc.,1982

5. Ion beam fabrication of ultrafine patterns on cemented carbide chips with ultrafine grains;Miyamoto;Annals of the CIRP,1993

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