Author:
Evans C.J.,Paul E.,Dornfeld D.,Lucca D.A.,Byrne G.,Tricard M.,Klocke F.,Dambon O.,Mullany B.A.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference133 articles.
1. Technological advances in fine abrasive processes;Komanduri;CIRP Annals,1997
2. Observations on polishing and ultra-precision machining of semi-conductor substrate materials;Venkatesh;CIRP Annals,1995
3. Relations between abrasive processes;Salje;CIRP Annals,1988
4. Chemical Mechanical Planarization of Microelectronic Materials;Steigerwald,1997
5. On material removal mechanisms in finishing of advanced ceramics and glasses;Komanduri;CIRP Annals,1996
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