A universal high-current implanter for surface modification of materials
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
1. Practical application of ion implantation for modifying tribological properties of metals
2. Practical applications of ion implantation for tribological modification of surfaces
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Mass spectrometry improvement on an high current ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-12
2. Optimization Of A Mass Spectrometry Process;AIP Conference Proceedings;2011
3. A low-cost, accurate and non-intercepting continuous method for beam current measurements in a high-current ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-12
4. High-current and broad-beam ion implanter;Vacuum;2003-03
5. Herstellung von Hartstoffschichten durch nachträgliche Erwärmung von ionenimplantiertem Titan;Materialwissenschaft und Werkstofftechnik;2000-07
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