D.c. magnetron sputtering of oxidation-resistant chromium and CrN films monitored by optical emission spectrometry-Reference-Cited by-同舟云学术

D.c. magnetron sputtering of oxidation-resistant chromium and CrN films monitored by optical emission spectrometry

Published:1991-07 Issue: Volume:139 Page:126-131
ISSN:0921-5093
Container-title:Materials Science and Engineering: A
language:en
Short-container-title:Materials Science and Engineering: A

Author:

Benien H.,Maushart J.,Meyer M.,Suchentrunk R.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference9 articles.

1. Oxidation resistant coatings for titanium alloys;Kearns,1988

2. Tabellen der Elektronenphysik, Ionenphysik und Übermikroskopie;von Ardenne,1956

3. Optical Society of America: Handbook of Optics;Driscoll,1978

4. Prozeβanalyse und Prozeβoptimierung durch optische Emissionsspektrometrie bei der reaktiven und nicht reaktiven Gleichstrom-Hochleistungskathodenzerstäubung von Chrom, Aluminium und Silizium;Maushart,1990

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