Nitrogen atoms in ArN2 flowing microwave discharges for steel surface nitriding
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
1. Preparation of silicon nitride films at room temperature using double‐tubed coaxial line‐type microwave plasma chemical vapor deposition system
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3. Afterglow and decaying plasma CVD systems
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5. Active species in microwave postdischarge for steel-surface nitriding
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1. Active species densities in R/x%N2 and R/x%(N2-5%H2) (R = Ar or He) microwave early afterglows;Journal of Physics: Conference Series;2019-05-01
2. Non-intrusive measurement of electron, vibrational, rotational temperatures and active species concentration in N2-H2 cathodic cage plasma;Surface and Coatings Technology;2018-06
3. Spectroscopic diagnostics of active screen plasma nitriding processes: on the interplay of active screen and model probe plasmas;Journal of Physics D: Applied Physics;2015-08-05
4. Langmuir probe and optical diagnostics of active screen N2–H2 plasma nitriding processes with admixture of CH4;Surface and Coatings Technology;2013-11
5. Spectroscopic studies of conventional and active screen N2–H2plasma nitriding processes with admixtures of CH4or CO2;Plasma Sources Science and Technology;2013-10-01
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