Author:
Trabzon L.,Awadelkarim O.O.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference36 articles.
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4. Impact of polysilicon dry etching on 0.5 /spl mu/m NMOS transistor performance: the presence of both plasma bombardment damage and plasma charging damage
5. Observation of a new type of plasma etching damage: Damage to N‐channel transistors arising from inductive metal loops
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26 articles.
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