Author:
Weber R.,Mertin W.,Kubalek E.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Internal current probing of integrated circuits using magnetic force microscopy;Campbell,1993
2. Scanning Force Microscopy;Sarid,1991
3. Cantilever influence suppression of contactless IC-testing by electric force microscopy;Wittpahl;Microelectronics Reliability,1998
4. Voltage contrast measurement on sub-micrometer structures with an electric force microscope based test system;Behnke;Microelectronics Reliability,1999
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献