1. A versatile two-dimensional ion implantation simulator incorporated in an integrated process simulation system;Takano;Microelectron. Eng.,1991
2. Grid generation for the solution of partial differential equations;Eiseman,1987
3. Adaptive gridding for finite difference solutions to heat and mass transfer problems;Dwyer,1982
4. Simulation of critical IC fabrication processes using advanced physical and numerical methods;Jüngling;J. Solid-State Circuits,1985