Research on adhesion strength and optical properties of SiC films obtained via RF magnetron sputtering-Reference-Cited by-同舟云学术

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Research on adhesion strength and optical properties of SiC films obtained via RF magnetron sputtering

Published:2020-04 Issue: Volume:64 Page:79-86
ISSN:0577-9073
Container-title:Chinese Journal of Physics
language:en
Short-container-title:Chinese Journal of Physics

Author:

Wang Yizhe,Tuofu Zha-ma,Yue Zhenming,Sun Hui,Gong Jianhong,Gao Jun

Funder

Key R&D project of Shandong Province

Program of Science and Technology of Suzhou

Shandong Province Natural Science Foundation

China Postdoctoral Science Foundation

Publisher

Elsevier BV

Subject

General Physics and Astronomy

Reference31 articles.

1. Xing C.Y., Chen S.Y., Liang X., et al. Two-dimensional MXene (Ti3C2)-Integrated cellulose hydrogels: toward smart three-dimensional network nanoplatforms exhibiting light-induced swelling and bimodal photothermal/chemotherapy anticancer activity. ACS Appl. Mater. Interfaces10 (33), 27631–27643.

2. Liu J., Jiang X.T., Zhang R.Y., et al. MXene-enabled electrochemical microfluidic biosensor: applications toward multicomponent continuous monitoring in whole blood. Adv. Funct. Mater.29 (6), 1807326.

3. Xu Y.H., Wang W.X., Ge Y.Q., et al. Stabilization of black phosphorous quantum dots in PMMA nanofiber film and broadband nonlinear optics and ultrafast photonics application. Adv. Funct. Mater.27 (32), 1702437.

4. Luo S.J., Zhao J.L., Zou J.F., et al. Self-standing polypyrrole/black phosphorus laminated film: promising electrode for flexible supercapacitor with enhanced capacitance and cycling stability. ACS Appl. Mater. Interfaces10 (4), 3538–3548.

5. Crystallization process of amorphous silicon-carbon alloys;Calcagno;Thin Solid Films,2002

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4. Novel Photonic Applications of Silicon Carbide;Materials;2023-01-22

5. Elaboration of Graded Band-Gap a-SiC Thin-Film Using RF Magnetron Sputtering Technique;2022 36th Symposium on Microelectronics Technology (SBMICRO);2022-08-22

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