Systematic research on the performance of self-designed microwave plasma reactor for CVD high quality diamond-Reference-Cited by-同舟云学术

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Systematic research on the performance of self-designed microwave plasma reactor for CVD high quality diamond

Published:2018-10 Issue:5 Volume:14 Page:373-379
ISSN:2214-9147
Container-title:Defence Technology
language:en
Short-container-title:Defence Technology

Author:

Li Xiao-Jing,Zhou Shun,Chen Gang,Wang Da-Sen,Pei Ning,Guo Hai-Lin,Nie Feng-Ming,Zhang Xu,Feng Shi

Funder

Inner Mongolia Natural Science Foundation

Publisher

Elsevier BV

Subject

Metals and Alloys,Mechanical Engineering,Ceramics and Composites,Computational Mechanics

Reference18 articles.

1. A review of diamond synthesis by CVD processes;Schwander;Diam Relat Mater,2011

2. An experimental study of high pressure synthesis of diamond films using a microwave cavity plasma reactor;Kuo;Diam Relat Mater,1997

3. Investigation of diamond deposition uniformity and quality for free standing film and substrate application;Zuo;Diam Relat Mater,2008

4. Microwave plasma diamond film growth;Kahler,1997

5. The control of growth parameters in the synthesis of high-quality single crystalline diamond by CVD;Achard;J Cryst Growth,2005

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and simulation of a novel MPCVD reactor with three-cylinder cavity;Vacuum;2022-06

2. Simulation of diamond synthesis by microwave plasma chemical vapor deposition with multiple substrates in a substrate holder;Journal of Crystal Growth;2022-02

3. Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme;Materials;2021-08-10

4. Investigation on the influence of the gas flow mode around substrate on the deposition of diamond films in an overmoded MPCVD reactor chamber;Vacuum;2020-12

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