The application of control chart for defects and defect clustering in IC manufacturing based on fuzzy theory
Author:
Publisher
Elsevier BV
Subject
Artificial Intelligence,Computer Science Applications,General Engineering
Reference10 articles.
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3. A simulation-based semiconductor chip yield model incorporating a new defect cluster index;Jun;Microelectronics Reliability,1999
4. Defect density distribution for LSI yield calculations;Stapper;IEEE Transactions on Electron Devices,1973
5. The effects of wafer to wafer density variations on integrated circuit defect and fault density;Stapper;IBM Journal of Research Development,1985
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