An embedded gate gate-all-around FinFET for biosensing application
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Published:2024-11
Issue:
Volume:195
Page:207972
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ISSN:2773-0123
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Container-title:Micro and Nanostructures
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language:en
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Short-container-title:Micro and Nanostructures
Author:
Jia HujunORCID,
Yang Wanli,
Cao Weitao,
Zhao Linna,
Su Qiyu,
Wei Xingyu,
Cao Zhen,
Yang Yintang