Influence of AlN/ScAlN piezoelectric multilayer on the electromechanical coupling of FBAR

Author:

Yang Qi-Wei,Lin Re-Ching,Sun Shih-JyeORCID

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Biomaterials

Reference24 articles.

1. Ultra-miniature high-Q filters and duplexers using FBAR technology;Ruby,2001

2. Analysis and enhancement of Q-factor in thin-film bulk acoustic wave resonator (FBAR);Joshi;J. Phys.: Conf. Ser.,2022

3. High-quality film bulk acoustic resonators fabricated on AlN films grown by a new two-step method;Yi;IEEE Electron. Device Lett.,2022

4. Electromechanical Coupling Coefficient kt2 of Cr Doped AlN Films Grown by Sputtering Deposition;Suzuki,2019

5. A high performance multiband BAW filter;Chawla;Int. J. Technol.,2019

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