1. Telecentric large field lenses using fresnel optics;Schuster;Proc. SPIE,2002
2. Reflective Optics;Korsch,1991
3. Study of the integration of EUVL experimental tool;Jin;Acta Opt. Sin.,2002
4. Optical performance of extreme-ultraviolet lithography for 50nm generation;Li;Acta Opt. Sin.,2004
5. Optical system of ultra-thin rear projection equipped with refractive reflective projection optics;Shiama;SID’02,2002