Research on high-quality projecting reduction lithography system based on digital mask technique

Author:

Gao Yiqing,Shen Tingzheng,Chen Jinsong,Luo Ningning,Qi Xinmin,Jin Qi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. LCD real-time mask technique for fabrication of continuous microoptical elements;Peng;Acta Optica Sinica,2003

2. General design of parallel laser direct writing system for manufacturing gray-scale masks;Yan;J. Optoelectronics·Laser,2002

3. Methods of eliminating pixelilation effect in electro-addressable spatial light modulator;Li;Acta Photonica Sinica,2002

4. J.M. Florence, Display system architectures for digital micromirror device (DMD)-based projections, Proc. SPIE 2650 193–208

5. The Principles and applications of two novel electrical addressed spatial light modulators;Chen;International Symposium on Test and Measurement (ISTM),2003

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