Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference12 articles.
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5. Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer;Sasaki;Opt. Eng.,2003
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