Effect of ion bombardment on the properties of Nb2O5 films deposited in large coating chamber
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference28 articles.
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3. Comparison of laser-induced damage in Ta2O5 and Nb2O5 single-layer and high reflectors;Xu;Chin. Opt. Lett.,2011
4. Niobium pentoxide (Nb2O5) thin films: rf Power and substrate temperature induced changes in physical properties;Usha;Optik,2015
5. Optical constants of e-beam evaporated and annealed Nb2O5 thin films with varying thickness;Zhao;J. Phys. D: Appl.Phys.,2016
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4. The properties of SiO2 thin films fabricated by dual ion assisted deposition in large coating chamber;Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021);2022-02-15
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