Evaluation of scandium ratio effect on the permittivity (ε) of Sc-AlN by EMT modeling and spectroscopic ellipsometry measurement
Author:
Funder
DAAD
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference25 articles.
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4. The optical and structural properties of AlN thin films characterized by spectroscopic ellipsometry;Joo;Thin Solid Films,2000
5. Characterization of polycrystalline AlN films using variable-angle spectroscopic ellipsometry;Wang;J. Vac. Sci. Technol. A: Vac. Surf. Films,2005
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