Design and experiment of a cantilever beam pressure sensor using an optical microring resonator

Author:

Mo Wenqin,Fu Xueying,Jin Fang,Song Junlei,Dong Kaifeng

Funder

Wuhan National Laboratory for Optoelectronics

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Conformable amplified lead zirconate titanate sensors with enhanced piezoelectric response for cutaneous pressure monitoring;Dagdeviren;Nat. Commun.,2014

2. High sensitivity piezoelectric sensors using flexible PZT thick-film for shock tube pressure testing;Liang;Sens. Actuators A,2015

3. A wireless batch sealed absolute capacitive pressure sensor;Akar;Sens. Actuators A,2001

4. High-temperature single-crystal 3c-sic capacitive pressure sensor;Young;IEEE Sens. J.,2004

5. Flip-chip packaging of piezoresistive pressure sensors;Campabadal;Sens. Actuators A,2006

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