A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining-Reference-Cited by-同舟云学术

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A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

Published:2017-10 Issue: Volume:101 Page:8-15
ISSN:0968-4328
Container-title:Micron
language:en
Short-container-title:Micron

Author:

De Felicis Daniele,Mughal Muhammad Zeeshan,Bemporad Edoardo

Funder

University of Roma Tre (D De Felicis)

European FP7 project (M Z Mughal), iSTRESS

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference26 articles.

1. Fabrication of advanced probes for atomic force microscopy using focused ion beam;Ageev;Microelectron. Reliab.,2015

2. Axicon lens on optical fiber forming optical tweezers, made by focused ion beam milling;Cabrini;Microelectron. Eng.,2006

3. Step and flash imprint lithography: a new approach to high-resolution patterning, Microlithography’99;Colburn;Int. Soc. Opt. Photon.,1999

4. Emerging fabrication techniques for 3D nano-structuring in plasmonics and single molecule studies;De Angelis;Nanoscale,2011

5. Effects of synthetic micro- and nano-structured surfaces on cell behavior;Flemming;Biomaterials,1999

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Roadmap for focused ion beam technologies;Applied Physics Reviews;2023-12-01

2. A New Tool for Automation of Focused Ion Beam Bitmap Milling of Two-and Three-Dimensional Micro and Nanostructures.;Microscopy and Microanalysis;2022-08-01

3. Controlling the parameters of focused ion beam for ultra-precise fabrication of nanostructures;Ultramicroscopy;2022-04

4. The Progress and Perspectives of Nanotechnology Applied in Nontraditional Precision Machining Processes for Advanced Industrial Applications;Recent Patents on Nanotechnology;2022-03

5. Fabrication of probe tips via the FIB method for nanodiagnostics of the surface of solids by atomic force microscopy;Journal of Physics: Conference Series;2021-12-01

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