Angle resolved velocity distributions of sputtered medium Z atoms
Author:
Publisher
Elsevier BV
Subject
Nuclear Energy and Engineering,General Materials Science,Nuclear and High Energy Physics
Reference7 articles.
1. Angle resolved velocity distributions of sputtered aluminum atoms
2. Laser induced fluorescence as a technique for investigations of sputtering phenomena
3. Laser fluorescence measurements of the flux density of titanium sputtered from an oxygen covered surface
4. Velocity distributions of the metal atoms sputtered from oxygen and nitrogen covered Ti- and Al-surfaces
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3. Space-resolved velocity and flux distributions of sputtered Ti atoms in a planar circular magnetron discharge;Plasma Sources Science and Technology;2011-07-07
4. Determination of angle resolved velocity distributions of sputtered tungsten atoms;Journal of Nuclear Materials;1999-03
5. Diagnostic measurements and modelling of an ion-based PVD-process with high deposition rates;Surface and Coatings Technology;1997-12
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