Boron diffusion in polycrystalline silicon layers
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Silicon-gate technology
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3. Properties of Polycrystalline Silicon Deposited on Silicon Nitride Layers
4. Proc. Eighteenth Ann. Reliability Physics Conf.;Faggin,1970
5. Resistivity of Bulk Silicon and of Diffused Layers in Silicon
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