Author:
Su Y.K.,Huang C.J.,Leu R.L.,Pan F.M.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
11 articles.
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1. Dry Etching of Various Materials;Dry Etching Technology for Semiconductors;2014-10-01
2. 1/f noise measurements on indium antimonide metal–oxide–semiconductor field-effect transistors;Journal of Applied Physics;1999-06-15
3. Plasma Engineering;Advances in Electrochemical Sciences and Engineering;1999-02-23
4. Sidewall surface chemistry in directional etching processes;Materials Science and Engineering: R: Reports;1998-12
5. Transport of chemically active species in plasma reactors for etching;Plasma Sources Science and Technology;1997-08-01