A vertical submicron SiC thin film transistor
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference9 articles.
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2. High‐voltage 6H‐SiCp‐njunction diodes
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4. Characterization of device parameters in high‐temperature metal‐oxide‐semiconductor field‐effect transistors in β‐SiC thin films
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1. Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films;Materials Research Express;2018-03-16
2. Design Considerations for ZnO Transistors Made Using Spatial ALD;ECS Transactions;2014-08-13
3. Influence of filament-to-substrate distance on the spectroscopic, structural and optical properties of silicon carbide thin films deposited by HWCVD technique;Journal of Materials Science: Materials in Electronics;2014-03-27
4. Multi-Scale Simulation of Nucleation and Growth of Nanoscale SiC on Si;Journal of Computational and Theoretical Nanoscience;2012-11-01
5. Defeating the trade-off between process complexity and electrical performance with vertical zinc oxide transistors;Applied Physics Letters;2012-10-29
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