Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Evaporated film profiles over steps in substrates
2. Proceedings of the IIT Research Institute Scanning Electron Microscopy Symposium,1968-1969-1970-1971-1972
3. Electron Microscopy and Structure of Materials;Meieran,1971
4. Device failure analysis by scanning electron microscopy
5. N. MacDonald and T.E. Everhart, private communication.
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Strong effect of dopant concentration gradient on etching rate;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01
2. Methods for the measurement of two-dimensional doping profiles;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-01
3. References;Thin Films by Chemical Vapour Deposition;1990
4. Cross-sectional characterization of integrated circuit structures by scanning electron microscopy;Journal of Materials Science Letters;1987-06
5. The Influence of High Pressure Oxidation on Boron Redistribution in LOCOS Structures;Journal of The Electrochemical Society;1984-06-01