Sliding-mode control combined with improved adaptive feedforward for wafer scanner-Reference-Cited by-同舟云学术

Sliding-mode control combined with improved adaptive feedforward for wafer scanner

Published:2018-03 Issue: Volume:103 Page:105-116
ISSN:0888-3270
Container-title:Mechanical Systems and Signal Processing
language:en
Short-container-title:Mechanical Systems and Signal Processing

Author:

Li Xiaojie,Wang Yiguang

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

Reference26 articles.

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3. Precision positioning of wafer scanners segmented iterative learning control for nonrepetitive disturbances [applications of control];Mishra;IEEE Control Syst.,2007

4. Performance-improved design of N-PID controlled motion systems with applications to wafer stages;Heertjes;IEEE Trans. Indust. Electron.,2009

5. Design of a gain scheduled PID controller for the precision stage in lithography;Kim;Int. J. Precis. Eng. Manuf.,2011

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