Total harmonic distortion estimation in piezoelectric micro-electro-mechanical-system loudspeakers via a FEM-assisted reduced-order-model-Reference-Cited by-同舟云学术

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Total harmonic distortion estimation in piezoelectric micro-electro-mechanical-system loudspeakers via a FEM-assisted reduced-order-model

Published:2025-01 Issue: Volume:222 Page:111762
ISSN:0888-3270
Container-title:Mechanical Systems and Signal Processing
language:en
Short-container-title:Mechanical Systems and Signal Processing

Author:

Gazzola Chiara,Corigliano Alberto^ORCID,Zega Valentina^ORCID

Publisher

Elsevier BV

Reference69 articles.

1. Micro speakers;Rusconi,2022

2. D. Beer, A. Mannchen, T. Fritsch, J. Kuller, A. Zhykhar, G. Fischer, F.M. Fiedler, Expedition MEMS Speaker, in: Forum Acusticum, 2020, pp. 2921–2928.

3. Review of recent development of MEMS speakers;Wang;Micromachines,2021

4. MEMS audio speakers;Garud;J. Micromech. Microeng.,2023

5. High performance piezoelectric MEMS loudspeaker based on an innovative wafer bonding process;Liechti;Sensors Actuators A,2023

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