A novel long-stroke fast tool servo system with counterbalance and its application to the ultra-precision machining of microstructured surfaces

Author:

Gong Zheng,Huo Dehong,Niu Zengyuan,Chen Wanqun,Cheng Kai

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

Reference24 articles.

1. Design of a fast tool servo based diamond turning machine for fabricating micro-structured surfaces;Yu;Key Eng. Mater.,2010

2. D. L. Trumper and X. Lu, “Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth,” Towar. Synth. Micro-/Nano-systems, pp. 11–19, 2006.

3. Development of a fine tool servo with force monitoring system for nanomachining applications;Gan;J. Vac. Sci. Technol. B Microelectron. Nanom. Struct.,2009

4. Development of a fast tool servo in noncircular turning and its control;Ma;Mech. Syst. Signal Process.,2013

5. Precitech FTS 70/35, “FTS 70/35 Fast tool servo,” Precitech, 2021. [Online]. Available: https://www.precitech.com/product/accessoriesoverview/fasttoolservo. [Accessed: 30-Dec-2021].

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