A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics
Author:
Publisher
Elsevier BV
Subject
Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering
Reference23 articles.
1. Design, identification, and control of a flexure-based xy stage for fast nanoscale positioning;Yong;IEEE Trans. Nanotechnol.,2009
2. Design, modeling, analysis and testing of a novel piezo-actuated xy compliant mechanism for large workspace nano-positioning;Zhu;Smart Mater. Struct.,2016
3. Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining;Zhu;Precision Eng.,2014
4. Development of a high-bandwidth xy nanopositioning stage for high-rate micro-/nanomanufacturing;Polit;IEEE/ASME Trans. Mechatron.,2011
5. Design and analysis of a totally decoupled flexure-based xy parallel micromanipulator;Li;IEEE Trans. Robot.,2009
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