Silicon micromachining for microsensors and microactuators-Reference-Cited by-同舟云学术

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Silicon micromachining for microsensors and microactuators

Published:1990-04 Issue:1-4 Volume:11 Page:73-82
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Benecke Wolfgang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Dynamic micromechanics of silicon: Techniques and devices;Petersen;IEEE Trans. Electron Dev., ED-25,1978

2. Silicon as a mechanical material;Petersen,1982

3. Micromechanics: A silicon microfabrication technology;Csepregi;Microelectronic Engineering,1985

4. Micromachining of silicon mechanical structures;Kaminsky;J. Vac. Sci. Technol.,1985

5. Mikromechanik;Heuberger,1989

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Long-term structure stability of Ti/Au layered micro-cantilever evaluated by vibration test;Microelectronic Engineering;2019-02

2. Developments in Microelectromechanical Systems (MEMS): A Manufacturing Perspective;Journal of Manufacturing Science and Engineering;2003-11-01

3. Friction in Micromechanisms;Friction and Lubrication in Mechanical Design;1998-09

4. Microbiosensors using electrodes made in Si-technology;Experientia Supplementum;1997

5. Biosensors for analytical microsystems;Microsystem Technologies;1995-03

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