1. A SEM-based workstation for design validation;Vernay,1986
2. Computer control of Electron beam testing for design validation of VLSI circuits;Ranasinghe,1986
3. A high speed signal averager for electron beam test systems;Machin,1987
4. Automatic positioning for electron beam probing;Battu',1986
5. Automatic registration of scanning electron microscope images;Stentiford,1987