LSI logic-state measurement with electron beam tester-Reference-Cited by-同舟云学术

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LSI logic-state measurement with electron beam tester

Published:1990-05 Issue:1-4 Volume:12 Page:425-431
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Kawabata M.,Muto A.,Mukunoki T.,Ookubo K.,Furukawa Y.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. EB-Tester Evaluation of 1-Mbit CMOS DRAM;Shimizu,1985

2. IC-Internal Electron Beam Logic State Analysis;Ostrow;SEM,1982

3. Fast Fault Diagnostic Method Using Fault Dictionary for Electron Beam Tester;Yano;ITC,1987

4. The Electron Beam System for The Automatic Failure Analysis of Logic Devices;Osaka,1987

5. Quantitative Voltage Measurement by a Software Closed Loop Technique in electron Beam Testing;Furukawa,1986

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