Electronic study of plasma-induced damage in GaAs heterostructures
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Sidewall damage inn+‐GaAs quantum wires from reactive ion etching
2. Microfabrication and optical study of reactive ion etched InGaAsP/InP and GaAs/GaAlAs quantum wires
3. Dry etching induced damage on vertical sidewalls of GaAs channels
4. Simultaneous Fabrication of Vertical and 45° Mirrors of InP for Surface-Emitting Lasers Using Inclined Cl Ion Beams
5. Pseudomorphic InyGa1−yAs/GaAs/AlxGa1−xAs single quantum well surface‐emitting lasers with integrated 45° beam deflectors
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