X-ray lithography

Author:

Heuberger A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference51 articles.

1. X-Ray Lithography: “Can it be Justified”;Wilson;SPIE,1985

2. Multilayer Resist Processing: Economic Considerations;Lee,1986

3. Excimer Laser Projection Lithography on a Full-Field Scanning Projection System;Kerth;IEEE Electron Dev. Lett.,1986

4. Methods and Materials for Submicrometer-Resolution Excimer-Laser Projection Patterning;Ehrlich;30th Intern. Symp. on Electron, Ion and Photon Beams,1986

5. Reduction Photolithography by Ablation at Wavelength 193 nm;Goodall;Optics Communications,1986

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