Author:
Weill A.,Dechenaux E.,Paniez P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Thermal effects on the photoresists AZ 1350J;Dill;IBM J. Res. Develop.,1977
2. Thermal analysis of positive photoresist films by mass spectrometry;Shaw;IBM J. Res. Develop.,1977
3. Bake effects in positive photoresist;Batchelder;Solid State Technol.,1983
4. Thermal Characterisation of Polymeric Materials;Turi,1981
5. Characterizing photoresists by thermal analysis;Appelt;Polymer. Engrg. Sci.,1983
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献