Author:
Prongue´ D.,Rothuizen H.,Vasey F.,Vettiger P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference2 articles.
1. A computer-controlled electron-beam machine for micro-circuit fabrication;Chang,1971
2. E-beam lithography of curved structures with an enhanced vector-scan pattern generator supporting conic-based primitives;Vasey;J. Vac. Sci. Technol.,1994
Cited by
2 articles.
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