Author:
Toubhans I.,Fabbro R.,Faral B.,Chaker M.,Pepin H.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Introduction to microlithography,1983
2. Research Report Institute of Laser Engineering, Osaka University, JAPAN
3. Proceedings of the SPIE Meeting Santa Clara Mars;Mochezuki,1987
4. X-ray conversion efficiency as a function of atomic number for 0.26-μm-laser–irradiated targets
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. X-ray emission from plasmas produced by Nd-laser on Fe targets;Il Nuovo Cimento D;1993-05
2. Plasma soft x‐ray source generated by 4‐ns excimer laser pulses;Applied Physics Letters;1992-01-27
3. Particle Beams;The Physics of Micro/Nano-Fabrication;1992
4. X-ray lithography: On the path to manufacturing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11