Author:
Luethje H.,Harms M.,Bruns A.,Mackens U.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Defects in x-ray masks: Detection and printability
2. Mueller, K.-H., Tischer, P., Windbrake, W., Proc. EIPB Conf. Portland '85.
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