Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
2. A review of ion projection lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-05