Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Elastic Deformation of X-ray Lithography Masks Under External Loading, A. Chen, S. Lalapet, J. Maldonado
2. Optimization of an x-ray mask design for use with horizontal and vertical kinematic mounts;Laird;SPIE,1991
3. Electrode Phenomena During Anodic Bonding of Silicon to Pyrex Glass;Albaugh,1987
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8 articles.
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