Author:
Acosta R.E.,Johnson W.A.,Berry B.S.,Pritchet W.C.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. paper presented at EIPBT'91;Faure,1991
2. paper presented at EIPBT'91;Khan-Malek,1991
3. Dynamical method for the thermomechanical study of thin membranes
4. Internal stress and internal friction in thin‐layer microelectronic materials
5. Diffusion Phenomena in Thin Films and Microelectronic Materials;Berry,1988
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