Author:
Brodie A.D.,Meisburger W.D.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Electron. and Elect. Phy. Suppl. 21;Jansen,1990
2. Computer programs for the design and optimization of electron and ion beam lithography systems
3. Coulomb Interaction Program;Meisburger,1985
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