Automatic selection of optimal probing points for e-beam measurements-Reference-Cited by-同舟云学术

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Automatic selection of optimal probing points for e-beam measurements

Published:1992-03 Issue:1-4 Volume:16 Page:111-120
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Garino P.,Battù M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. The Quad-CIF tree: A Data structure for Hierarchical On-Line Algorithms;Kedem,1982

2. Two-layer Quad Trees: A Data Structure for High-Speed Interactive Layout Tools;Li;IEEE Trans. on CAD,1988

3. Design for E-beam debuggability;Melgara,1988

4. Local field effects on voltage measurement using a retarding field analyser in the scanning electron microscopy;Fujioka;Scanning Electron Microscopy,1981

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Selected contactless optoelectronic measurements for electronic applications (invited);Review of Scientific Instruments;1998-02

2. Automatic probing system for electron beam tester;Microelectronic Engineering;1996-02

3. The role of internal waveform measurements in IC development;Microelectronic Engineering;1994-03

4. System Integration;Electron Beam Testing Technology;1993

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