Author:
Gallus H.,Görlich S.,Harbeck H.,Keβler P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. High-performance electron-optical column for testing ICs with submicrometer design rules;Frosien;Microelectronic Engineering,1987
2. Design and Characteristics of a Lens Spectrometer with Electrostatic Extraction for Electron-Beam Probing;Engelhardt;Microelectronic Engineering,1992
3. Submicron e-beam testing;Wolfgang;Inst. Phys. Conf. Ser.No 100: Section 9,1989
4. Address error of electron beams by local electric fields;Ura;Optik,1981
5. Primary-beam movement effects in electron-beam testing;Rao;Microelectronic Engineering,1992
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Automatic probing system for electron beam tester;Microelectronic Engineering;1996-02
2. Crosstalk effect in electron beam testing: Simulations and measurements;Microelectronic Engineering;1994-03
3. Principles and Applications;Electron Beam Testing Technology;1993
4. Introduction;Electron Beam Testing Technology;1993