Electron beam testing of monolithic integrated micro- and millimeterwave circuits-Reference-Cited by-同舟云学术

Electron beam testing of monolithic integrated micro- and millimeterwave circuits

Published:1992-03 Issue:1-4 Volume:16 Page:165-172
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Fehr J.,Sinnwell H.,Balk L.J.,Kubalek E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Flexible picosecond probing of integrated circuits with chopped electron beams;Winkler;IBM J. Res. Develop.,1990

2. Picosecond optical sampling of GaAs integrated circuits;Weingarten;IEEE J. Quant. Electron.,1988

3. Electro-optic sampling of high-speed devices and integrated circuits;Wiesenfeld;IBM J. Res. Develop.,1990

4. Electron beam test techniques for integrated circuits;Menzel;Scanning electron microscopy,1989

5. A 100-femtosecond electron beam blanking system;Fehr;Microelectronic Engineering,1990

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1. High spatially resolved MMIC-internal millimetre-wave measurements of sinusoidal signals by high frequency electric force microscope-testing;Electronics Letters;1998

2. Optoelectronic on-chip characterization of ultrafast electric devices: Measurement techniques and applications;IEEE Journal of Selected Topics in Quantum Electronics;1996

3. Electro-optic probing of RF signals in submicrometre MMIC devices;Electronics Letters;1995-12-07

4. 104 GHz signals measured by high frequency scanning force microscope test system;Electronics Letters;1995-06-22

5. Electrical characterization of integrated circuits by scanning force microscopy;Materials Science and Engineering: B;1994-05