Scanning-force-microscope test system for device internal test with high spatial and temporal resolution-Reference-Cited by-同舟云学术

Scanning-force-microscope test system for device internal test with high spatial and temporal resolution

Published:1994-03 Issue:1-4 Volume:24 Page:91-98
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Böhm Christoph,Roths Christoph,Kubalek Erich

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference13 articles.

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3. Design and Processing Considerations for mm-Wave Multifunction MMIC's;Ramachandran;Microwave Journal,1991

4. Electrical Characterization of Megabit DRAMs, Part 2: Internal Testing;Kölzer;IEEE Design & Test of Computers,1991

5. E. Plies, J. Otto, “Voltage Measurements Inside Integrated Circuits Using Mechanical Electron Probes”, Scanning Electron Microscopy, Vol. 1985/IV, 1491–1500

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1. Nano- and meso-measurement methods in the study of dielectrics;IEEE Transactions on Dielectrics and Electrical Insulation;2005-10

2. Electric force microscopy testing of digital voltages using the heterodyne mixing technique;Journal of Physics D: Applied Physics;2003-02-27

3. High-frequency near-field microscopy;Review of Scientific Instruments;2002-07

4. Cross-talk in electric force microscopy testing of parallel sub-micrometer conducting lines;Microelectronics Reliability;2000-08

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