Integration of sol-gel PZT with silicon-on-sapphire CMOS circuitry-Reference-Cited by-同舟云学术

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Integration of sol-gel PZT with silicon-on-sapphire CMOS circuitry

Published:1995-12 Issue:1-4 Volume:29 Page:29-32
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Bland T.,Obhi J.,Patel A.,Kirby P.,Robinson M.,Kerr J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Proc. RADECS;Kerr,1990

2. Proc. ISIF7;Obhi,1995

3. Symp. on VLSI Tech. Digest of Tech. Papers;Moazzami,1994

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