Author:
Matsuoka Genya,Murakoshi Hisaya,Yamamoto Kenichi,Ichihashi Mikio
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Product Dimensional Metrology and Pattern Defect Inspection;Microelectronics Manufacturing Diagnostics Handbook;1993
2. Critical dimension control of high resolution metal structures by backscattered electrons;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-05