Author:
Babich E.,Paraszczak J.,Witman D.,McGouey R.,Hatzakis M.,Shaw J.,Chou N.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. E. Babich, M. Hatzakis, S. Jacobs, J. Paraszczak, J. Shaw, D. Witman U.S. Pat. 4, 782, 008 (1988)
2. D. Witman, J. Paraszczak, J. Shaw, E. Babich, M. Hatzakis, abstract submitted to ME89.
3. The use of organosilicon polymers in multilayer plasma resist processing
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