Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.-Reference-Cited by-同舟云学术

Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.

Published:1990-04 Issue:1-4 Volume:11 Page:413-416
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Assayag G.Ben,Sudraud P.,Gierak J.,Remiens D.,Menigaux L.,Dugrand L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Scanning ion microscopy: Elemental maps at high lateral resolution

2. Focused-ion-beam micromachined AlGaAs semiconductor laser mirrors;Puretz;Electronic lett.,1986

3. CW operation of widely and continuously tunable micromachined-coupled-cavity diode lasers

4. Micromachining of optical structures with focused ion beams

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and realization of a very high-resolution FIB nanofabrication instrument;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1999-05

2. Very high-resolution focused ion beam nanolithography improvement: A new three-dimensional patterning capability;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

3. Modification of semiconductor laser diodes by focused ion beam milling;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-05

4. Focused ion beam nanolithography on AlF3 at a 10 nm scale;Applied Physics Letters;1997-04-14

5. Determination of the spring constants of probes for force microscopy/spectroscopy;Nanotechnology;1996-09-01